Microscopy I

Thursday, November 1, 2018: 8:00 AM-9:40 AM
225AB (Phoenix Convention Center)
Dr. Edgar voelkl, PhD in Physics, Holowerk LLC, Mr. Yifei Meng, EAG and Dr. Lianfeng Fu, Lam Research Corporation
8:00 AM
Nanoscale Chemical Mapping of Semiconductor Devices and Materials via PiFM
Dr. Sung Park, Molecular Vista
8:25 AM
High Resolution Image Fusion of Linearly Polarized Subsurface Optical Images
Dr. Tenzile Berkin Cilingiroglu, Thermo Fisher Scientific; Mr. Neel Leslie, Thermo Fisher Scientific; Dr. Seema Somani, Thermo Fisher Scientific; Prasad Sabbineni, Thermo Fisher Scientific
8:50 AM
Narrow-Beam Argon Ion Milling of Ex Situ Lift-Out FIB Specimens Mounted on Various Carbon-Supported Grids
Dr. Michael J. Campin, E.A. Fischione Instruments, Inc.; Dr. Cecile S. Bonifacio, E.A. Fischione Instruments, Inc.; Dr. Lucille A. Giannuzzi, EXpressLO LLC; Mr. Paul Fischione, E.A. Fischione Instruments, Inc.
9:15 AM
Electron beam probing of active advanced FinFET circuit with fin level resolution
Dr. Tom X. Tong, Intel Corp.; Dr. H. J. Ryu, Intel; Dr. Wen-Hsien Chuang, Intel; Mrs. Jennifer Huening, Intel Corp.; Dr. Prasoon Joshi, Intel Corp.; Dr. Zhiyong Ma, Intel Corp.
See more of: Technical Program
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