Low Power Devices and Test Structures Case Studies - POSTER

Wednesday, October 31, 2018: 2:20 PM-4:20 PM
Ms. Rose Ring, LAM Research and Dr. Michael Bruce, SEMICAPS
Mitigation of Dielectric Charging in MEMS Capacitive Switches with Stacked TiO2/Y2O3 Insulator Film
Prof. George Papaioannou, University of Athens; Mr. Dimitris Birmpiliotis, University of Athens; Dr. Matroni Koutsoureli, University of Athens; Mr. Lorentzo Buhagier, University of Athens; Dr. Afshin Ziaei, Thales Research and Technology
High SRAM Low Power Mode Current
Mr. John Asquith, NXP Semiconductor; Mr. Frank Biyer, NXP Semiconductor; Mr. Kent Erington, NXP Semiconductor; Mr. Nelson Gomez, NXP Semiconductor; Mr. Stephen Heineke, NXP Semiconductor; Mr. Carey Wu, NXP Semiconductor; Mr. Juan Ybarra, NXP Semiconductor
OBIRCH for Isolating High and Low Resistance Test Structure Failures During Sub-14nm Technology Development
Dr. John E. Masnik, Global Foundries; Ms. Noor Jehan Saujauddin, Global Foundries; Kevin Davidson, Global Foundries; Ms. Esther P.Y. Chen, GLOBALFOUNDRIES Inc.; Dr. Felix Beaudoin, GLOBALFOUNDRIES
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