3D Device Failure Analysis

Monday, December 7, 2020: 1:30 PM-3:10 PM
Dr. Shidong Li, IBM and Ms. Claudia Keller, Infineon Technologies Munich
1:30 PM
Fault Isolation of Resistive/Open 3D Wafer Bonding Interconnects by Thermal Laser Stimulation and Light-Induced Capacitance Alteration
Dr. Kristof J.P. Jacobs, Imec; Dr. Soon-Wook Kim, IMEC; Prof. Ingrid De Wolf, imec; Dr. Eric Beyne, Imec
1:55 PM
Innovative Base Die Debug Technique with TSV Wirebond for 3D Stack-Die Devices
Dr. Wen-Hsien Chuang, Intel; Dr. Tom X. Tong, Intel; Mrs. May Ling Oh, Intel; Dr. Hyuk Ju Ryu, Intel; Dr. Di Xu, Intel; Mr. Swaran Kumar, Intel; Mr. Shuai Zhao, Intel; Mrs. Jennifer Huening, Intel; Dr. Chia-Yi Chen, Intel; Mr. Charles W Ladwig, Intel; Mr. Joshua D Foster, Intel; Mrs. Lacey Badger, Intel
2:20 PM
Laser ablation for throughput increase in large volume semiconductor failure analysis tasks
Mr. Marek Tuček, TESCAN Brno s.r.o.; Mr. Martin Búran, TESCAN Brno s.r.o.; Mr. Rostislav Váňa, TESCAN Brno s.r.o.; Mr. Lukáš Hladík, TESCAN ORSAY HOLDING a.s.; Mr. Jozef Vincenc Oboňa, TESCAN ORSAY HOLDING a.s.
2:45 PM
Addressing Failures in Advanced Packaging through a Correlative Workflow
Mr. Neel Leslie, Thermo Fisher Scientific; Mr. Heebeom Lee, Thermo Fisher Scientific; Ms. Zuzana Patakova, Thermofisher; Mr. Brian Lai, Thermo Fisher Scientific; Mingi Lee, Thermo Fisher Scientific; Dr. Christopher H. Kang, Thermo Fisher Scientific; Mr. Frantisek Zelenka, Thermofisher; Dr. Trond Varslot, Thermofisher
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