FIB SAMPLE PREPARATION: Automated cell layer counting and marking at target layer of 3D NAND TEM samples by Focused Ion Beam

Wednesday, November 3, 2021
West Hall 1-2 (Phoenix Convention Center)
Mrs. Jisu Ryu , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Jaeheum Baek , SK Hynix Semiconductor. Inc, Icheon-si, Gyeonggi-do, Korea, Republic of (South)
Mrs. Seojin Kim , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Dr. Christopher H. Kang , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)

Summary:

In this paper, the recipe development of automatic cell layer counting and FIB marking with using automated fashion to reach exact target layer of 3D NAND samples will be introduced.
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