Dielectric film thickness measurement via a convolutional neural network for integrated circuit delayering end pointing

Wednesday, November 3, 2021: 8:50 AM
105 AB (Phoenix Convention Center)
Mr. Jonathan Scholl , Battelle Memorial Institute, Columbus, OH
Mr. Nick Darby , Battelle Memorial Institute, Columbus, OH
Mr. Joshua G. Baur , Battelle Memorial Institute, Columbus, OH
Mr. Yash Patel , Battelle Memorial Institute, Columbus, OH
Mrs. Isabel Boona , Battelle Memorial Institute, Columbus, OH
Dr. Kurtis Wickey , Battelle Memorial Institute, Columbus, OH
Dr. Jeremiah P. Schley , Battelle Memorial Institute, Columbus, OH

See more of: Sample Preparation and Device Deprocessing
See more of: Technical Program