Wafer Pattern Recognition for Detecting Process Abnormalities in NAND Flash Memory Manufacturing
Tuesday, November 2, 2021: 1:40 PM
105 AB (Phoenix Convention Center)
Ms. Jeongin Choe
,
Samsung Electronics Co. Ltd., Hwaseong-si, Korea, Republic of (South)
Mr. Taehyeon Kim
,
Samsung Electronics Co. Ltd., Hwaseong-si, Korea, Republic of (South)
Ms. Saetbyeol Yoon
,
Samsung Electronics Co. Ltd., Hwaseong-si, Korea, Republic of (South)
Mr. Sangyong Yoon
,
Samsung Electronics Co. Ltd., Hwaseong-si, Korea, Republic of (South)
Prof. Myungsuk Kim
,
Kyungpook National University, Daegu, Korea, Republic of (South)
Prof. Woo Young Choi
,
Sogang University, Seoul, Korea, Republic of (South)
Dr. Ki-Whan Song
,
Samsung Electronics Co. Ltd., Hwaseong-si, Korea, Republic of (South)
Dr. Jai Hyuk Song
,
Samsung Electronics Co. Ltd., Hwaseong-si, Korea, Republic of (South)
