Product Yield, Test & Diagnostics II

Tuesday, November 2, 2021: 1:15 PM-2:05 PM
105 AB (Phoenix Convention Center)
Mr. Rommel Estores, ON Semiconductor and Mr. Jayant D'Souza, Mentor
1:15 PM
(V) Defect inspection wafer notch orientation and defect detection dependency
Dr. Lindarti Purwaningsih, GLOBALFOUNDRIES; Mr. Philipp Konsulke, GLOBALFOUNDRIES; Mr. Markus Tonhaeuser, GLOBALFOUNDRIES; Dr. Helena Jantoljak, GLOBALFOUNDRIES
1:40 PM
Wafer Pattern Recognition for Detecting Process Abnormalities in NAND Flash Memory Manufacturing
Ms. Jeongin Choe, Samsung Electronics Co. Ltd.; Mr. Taehyeon Kim, Samsung Electronics Co. Ltd.; Ms. Saetbyeol Yoon, Samsung Electronics Co. Ltd.; Mr. Sangyong Yoon, Samsung Electronics Co. Ltd.; Prof. Myungsuk Kim, Kyungpook National University; Prof. Woo Young Choi, Sogang University; Dr. Ki-Whan Song, Samsung Electronics Co. Ltd.; Dr. Jai Hyuk Song, Samsung Electronics Co. Ltd.
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