47th International Symposium for Testing and Failure Analysis (Oct. 31 - Nov. 4, 2021)
October 31 - November 04, 2021
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(V) Automated TEM Workflow for Inline Defect Characterization
Thursday, November 4, 2021: 1:20 PM
104 ABC (Phoenix Convention Center)
Dr. Hyun Woo Shim
,
Intel Corporation, Hillsboro, OR
Dr. Taehun Lee
,
Intel Corporation, Hillsboro, OR
Dr. Jonghan Kwon
,
Intel Corporation, Hillsboro, OR
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FIB Sample Preparation
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Technical Program