Thursday, November 4, 2021: 1:20 PM-3:50 PM
104 ABC (Phoenix Convention Center)
| * FIB prep for SEM/TEM |
| * FIB related artefacts |
| * Mulit-ion Source Plasma-FIB |
Dr. Cathy Vartuli, Butterfly Network and Ms. Rose Ring, Howard Hughes Research Labs
2:10 PM
(V) Accurate sub-micron device delayering of plan view TEM specimens by post-FIB Ar ion milling
Dr. Cecile S. Bonifacio, E.A. Fischione Instruments, Inc.;
Dr. Pawel Nowakowski, E.A. Fischione Instruments, Inc.;
Mr. Richard Li, E.A. Fischione Instruments, Inc.;
Ms. Mary Ray, E.A. Fischione Instruments, Inc.;
Mr. Paul Fischione, E.A. Fischione Instruments, Inc.
2:35 PM
(V) Plasma Etching Pre-treatment for a TEM Lamella Preparation of 3D NAND with High Aspect Ratio
Dr. Yu-Chih Chen, Macronix International Co., Ltd.;
Mr. Bing-Chang Li, Macronix International Co., Ltd.;
Mrs. Pei-Ling Hsu, Macronix International Co., Ltd.;
Mr. Tsung-Yi Lin, Macronix International Co., Ltd.;
Mr. I-An Chen, Macronix International Co., Ltd.;
Dr. Chun-Hung Lin, Macronix International Co., Ltd.;
Dr. Hsin-Cheng Hsu, Macronix International Co., Ltd.;
Mr. Chin-Chih Yeh, Macronix International Co., Ltd.;
Mr. Nan-Tzu Lian, Macronix International Co., Ltd.;
Mr. Ta-Hone Yang, Macronix International Co., Ltd.;
Mr. Kuang-Chao Chen, Macronix International Co., Ltd.
