(V) Accurate sub-micron device delayering of plan view TEM specimens by post-FIB Ar ion milling

Thursday, November 4, 2021: 2:10 PM

104 ABC (Phoenix Convention Center)

Dr. Cecile S. Bonifacio , E.A. Fischione Instruments, Inc., Export, PA

Dr. Pawel Nowakowski , E.A. Fischione Instruments, Inc., Export, PA

Mr. Richard Li , E.A. Fischione Instruments, Inc., Zhubei City, PA, Taiwan

Ms. Mary Ray , E.A. Fischione Instruments, Inc., Export, PA

Mr. Paul Fischione , E.A. Fischione Instruments, Inc., Export, PA