CASE STUDIES - DEVICE ANALYSIS: Failure Case Studies of Oxide-confined VCSELs

Wednesday, November 3, 2021
West Hall 1-2 (Phoenix Convention Center)
Mr. Kuang-Tse Ho , Materials Analysis Technology, Hsinchu City, Taiwan
Dr. Ching-Hsiang Chan , Materials Analysis Technology, Hsinchu City, Taiwan

Summary:

In this paper, a standard VCSEL FA flow is proposed, and four failure mechanisms and their possible root causes are presented. By this investigation, device developer can know how to prepare the samples, observe the defects, judge the root causes and propose suitable countermeasures.
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