(V) Application and optimization of automated ECCI mapping to the analysis of lowly defective epitaxial films on blanket or patterned wafers

Thursday, November 4, 2021: 3:00 PM
105 AB (Phoenix Convention Center)
Dr. Han Han , imec, Leuven, Belgium
Dr. Thomas Hantschel , imec, Leuven, Belgium
Mr. Libor Strakos , Thermo Fisher Scientific, Brno, Czech Republic
Mr. Pieter Lagrain , imec, Leuven, Belgium
Dr. Clement Porret , imec, Leuven, Belgium
Dr. Marina Baryshnikova , imec, Leuven, Belgium
Dr. Tomas Vystavel , Thermo Fisher Scientific, Brno, Czech Republic
Dr. Bernardette Kunert , imec, Leuven, Belgium
Dr. Roger Loo , imec, Leuven, Belgium

See more of: Microscopy and Material Characterization
See more of: Technical Program