Recent developments for the characterization of crystals and defects at the nanoscale using on-axis TKD in SEM

Thursday, November 4, 2021: 3:25 PM
105 AB (Phoenix Convention Center)
Dr. Daniel Goran , Bruker Nano GmbH, Berlin, Germany
Dr. Thomas Schwager , Bruker Nano GmbH, Berlin, Germany
Dr. Alice Bastos da Silva Fanta , DTU Nanolab, Copenhagen, Denmark
Mr. Brian Miller , Bruker Corporation, Madison, WI

Summary:

The talk will present recent hardware and software developments intended to push even further the spatial resolution limit and data quality achievable with on-axis TKD. Efforts to automate time resolved qualitative and quantitative characterization of nanomaterials and thin films during dynamic experiments, e.g. in-situ heating and/or electrical biasing, will be part of the discussion. Challenges ahead in the process of making on-axis TKD technique a robust, state-of-the-art tool for nanomaterials and beam sensitive materials research will be reviewed. The discussion will be supported my multiple experimental results acquired from various materials, using multiple SEM models and experimental conditions.