Dr. Christopher H. Kang

IBM Systems & Technology
Focused Ion Beam Lab
Hopewell Junction, NY
USA 12533

Papers:

FIB SAMPLE PREPARATION: Automated cell layer counting and marking at target layer of 3D NAND TEM samples by Focused Ion Beam
MICROSCOPY AND MATERIAL CHARACTERIZATION: Automated Metrology of verticality of Cross-sectioned channel hole at V-NAND with over 200 layers by Transmission Electron microscope