Dr. Heiko Stegmann

Staff Scientist Crossbeam Application
Carl Zeiss Microscopy GmbH
Oberkochen Germany 73447

Papers:

New Approach in Physical Failure Analysis Based on 3D Reconstruction
Basics and Current Aspects of Scanning Electron Microscopy
FIB-SIMS in FIB-SEMs: Practical Aspects for Physical Failure Analysis
Zero channel bias determination of device turn-on and the Seebeck effect in nanoprobing
Concepts for advanced sample holder and data exchange interfaces