Precise final thinning by concentrated Ar ion beam milling of plan view TEM specimens from phase change memory device prepared in Xe plasma FIB

Monday, November 13, 2023: 3:20 PM
104 A-B (Phoenix Convention Center)
Dr. Cecile S. Bonifacio , E.A. Fischione Instruments, Inc., Export, PA
Dr. Yiqi Yu , Carnegie Mellon University, Pittsburgh, PA
Ms. Mary Ray , E.A. Fischione Instruments, Inc., Export, PA
Prof. Marek Skowronski , Carnegie Mellon University, Pittsburgh, PA
Mr. Paul Fischione , E.A. Fischione Instruments, Inc., Export, PA

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