Precise final thinning by concentrated Ar ion beam milling of plan view TEM specimens from phase change memory device prepared in Xe plasma FIB

Monday, November 13, 2023: 3:20 PM

104 A-B (Phoenix Convention Center)

Dr. Cecile S. Bonifacio , E.A. Fischione Instruments, Inc., Export, PA

Dr. Yiqi Yu , Carnegie Mellon University, Pittsburgh, PA

Ms. Mary Ray , E.A. Fischione Instruments, Inc., Export, PA

Prof. Marek Skowronski , Carnegie Mellon University, Pittsburgh, PA

Mr. Paul Fischione , E.A. Fischione Instruments, Inc., Export, PA