The Influence of Temperature on Photoresist Profiles during TEM Sample Preparation using Cryo-FIB in Cold Temperature

Wednesday, November 15, 2023
Exhibit Hall | West 1 (Phoenix Convention Center)
Ms. Ji Hye Hyun , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Youngjin Cho , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Hyoungsic Cho , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Mrs. Seojin Kim , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Mr. In Chang Choi , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Beomjun Kim , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Dr. Yoonhae Kim , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Dr. Christopher H. Kang , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)