A Multiscale and Multimodal Correlative Microscopy Workflow to Characterize a Copper Segregation Identified in Epitaxial Layer in Power MOSFETs

Tuesday, November 14, 2023: 1:50 PM
104 A-B (Phoenix Convention Center)
Dr. Flavio Cognigni, Sapienza University of Rome, Italy , Sapienza University of Rome, Italy, roma, Italy
Dr. Heiko Stegmann , Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Mr. Giuseppe Sciuto , STMicroelectronics, catania, Italy
Dr. Giuseppe Anastasi , STMicroelectronics, Catania, Italy
Mr. Massimiliano Astuto , STMicroelectronics, catania, Italy
Dr. Marco Bonadonna , STMicroelectronics, catania, Italy
Prof. Marco Rossi , Sapienza University of Rome, Italy, roma, Italy
Dr. Domenico Mello , STMicroelectronics, catania, Italy

See more of: Case Studies: FA Process and Workflows I
See more of: Technical Program