Mapping Conductivity and Electric Field in an AlGaAs HEMT with STEM EBIC

Thursday, November 16, 2023: 9:20 AM
103 A-B (Phoenix Convention Center)
Dr. William A Hubbard, PhD , NanoElectronic Imaging, Inc., Riverside, CA

Summary:

STEM EBIC is performed on a cross section of a commercial AlGaAs HEMT. The EBIC indicates the electronic structure of the HEMT is preserved in the cross section.
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