Expanding Failure Analysis using Fluorescence combined with IR and Raman
Expanding Failure Analysis using Fluorescence combined with IR and Raman
Thursday, November 16, 2023: 9:00 AM
103 A-B (Phoenix Convention Center)
Summary:
Fluorescence imaging has been used for a long time in material science. The excitation and emission wavelengths of a given molecule are directly related to its inherent electronic states. We combined widefield fluorescence imaging to identify a regions of interest before using submicron O-PTIR and Raman to simultaneously collect IR and Raman spectroscopy. This can be used in Failure Analysis (FA) looking at Foreign Material (FM) or in research to improve devices.
Fluorescence imaging has been used for a long time in material science. The excitation and emission wavelengths of a given molecule are directly related to its inherent electronic states. We combined widefield fluorescence imaging to identify a regions of interest before using submicron O-PTIR and Raman to simultaneously collect IR and Raman spectroscopy. This can be used in Failure Analysis (FA) looking at Foreign Material (FM) or in research to improve devices.