Proposal for tilt-axis adjustment in V-NAND plan-view without Si substrate using automated metrology of Transmission Electron Microscope

Wednesday, November 15, 2023
Exhibit Hall | West 1 (Phoenix Convention Center)
Mr. Dong-yeob KIM , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Su-yeon Kim , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Woo Jun Kwon , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Dr. Min-kook kim , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)
Dr. Christopher H. Kang , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)

Summary:

In this paper, we propose a method for adjusting the tilt-axis of a sample without a Si substrate such as VNAND Plan-view in a transmission electron microscope. If the study in the circular VNAND channel hole is successful, it can be extended to additional samples. For example, the size of the lamella can be reduced by applying it to BEOL etc of DRAM.
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