Voltage Free Failure Analysis of Sub-15nm DRAM Gate Insulator Breakdown based on Thermal Laser Stimulation

Wednesday, November 15, 2023
Exhibit Hall | West 1 (Phoenix Convention Center)
Ms. Chae Soo Kim , Samsung Electronics, Pyungtaek-si, Gyeonggi-do, Korea, Republic of (South)
Ms. Bohyeon Jeon , Samsung Electronics, Pyungtaek-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Chiheon Byeon , Samsung Electronics, Pyungtaek-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Seungchul Yew , Samsung Electronics, Pyungtaek-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Dongin Lee , Samsung Electronics, Pyungtaek-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Seguen Park , Samsung Electronics, Pyungtaek-si, Gyeonggi-do, Korea, Republic of (South)
Mr. Hyodong Ban , Samsung Electronics, Pyungtaek-si, Gyeonggi-do, Korea, Republic of (South)