49th International Symposium for Testing and Failure Analysis (Nov. 12 – Nov. 16, 2023)
November 12 - 16, 2023
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Mr. Paul Fischione
CEO
E.A. Fischione Instruments, Inc.
Export, PA
USA 15632
Papers:
Precise final thinning by concentrated Ar ion beam milling of plan view TEM specimens from phase change memory device prepared in Xe plasma FIB
Top-down microelectronic device delayering work flow: Nanometer-scale uniformity over a millimeter-scale area