Dr. Christopher H. Kang

IBM Systems & Technology
Focused Ion Beam Lab
Hopewell Junction, NY
USA 12533

Papers:

Large area imaging for metrology with high accuracy using Scanning Electron Microscope
Advanced axis correction for automated workflow of Vertical Scanning Electron Microscopy applications
The Influence of Temperature on Photoresist Profiles during TEM Sample Preparation using Cryo-FIB in Cold Temperature
Proposal for tilt-axis adjustment in V-NAND plan-view without Si substrate using automated metrology of Transmission Electron Microscope