In Situ Sample Preparation for Nano Probing Using SDB FIB

Monday, November 17, 2025: 3:20 PM
1 (Pasadena Convention Center)
Mr. Guy Burg , Marvell, Yokneam, Israel, Israel

Summary:

Nano probing is critical for the design and optimization of circuits and effective sample preparation is essential for successful probing. This article presents the methodology and highlights the benefits of using the SDB FIB for in situ sample preparation. We suggest a novel way to utilize existing equipment for new sample preparation approaches and highlight much of the benefits of using this method.
See more of: FIB Sample Preparation IV
See more of: Technical Program