Optimized Ga FIB Lift-Out and Ar Ion Beam Milling for High-Quality STEM-EBIC TEM Specimens Dr. Cecile S. Bonifacio, E.A. Fischione Instruments, Inc.;
Dr. William Hubbard, PhD, NanoElectronic Imaging, Inc.;
Dr. Richard Wei-chi Li, E.A. Fischione Instruments, Inc.;
Ms. Mary Ray, E.A. Fischione Instruments, Inc.;
Mr. Paul Fischione, E.A. Fischione Instruments, Inc.
