FIB Sample Preparation IV

Monday, November 17, 2025: 3:00 PM-4:00 PM
Ballroom A (Pasadena Convention Center)
Dr. Cathy Vartuli, Vishay Siliconix Inc and Ms. Valerie Brogden, University of Oregon
3:00 PM
Optimized Ga FIB Lift-Out and Ar Ion Beam Milling for High-Quality STEM-EBIC TEM Specimens
Dr. Cecile S. Bonifacio, Fischione Instruments; Dr. William Hubbard, PhD, NanoElectronic Imaging, Inc.; Dr. Richard Wei-chi Li, E.A. Fischione Instruments, Inc.; Ms. Mary Ray, E.A. Fischione Instruments, Inc.; Mr. Paul Fischione, E.A. Fischione Instruments, Inc.
3:20 PM
In Situ Sample Preparation for Nano Probing Using SDB FIB
Mr. Guy Burg, Marvell
3:40 PM
Comparison of Manual and Semi-Automated FIB Sample Preparation Techniques for TEM Characterization of Semiconductor Devices
Dr. Jonas Wagner, TechInsights Inc.; Dr. Shatadru Chakravarty, TechInsights Inc.; Dr. Norman R. Fong, TechInsights Inc.; Dr. Lina Gunawan, TechInsights Inc.; Dr. Narinder Kaur, TechInsights Inc.; Mr. Alexander Sorkin, TechInsights Inc.; Dr. Jie Yang, TechInsights Inc.; Dr. Neerushana Jehanathan, TechInsights Inc.; Dr. Edson Bellido Sosa, TechInsights Inc.
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