Understanding the Latent Impact of Residual Particles in 3D NAND
Understanding the Latent Impact of Residual Particles in 3D NAND
Tuesday, November 18, 2025: 1:10 PM
2 (Pasadena Convention Center)
Summary:
In this paper, we investigated the electrical impact of memory hole (MH) mis-formation defects in a multi-tier three dimensional (3D) NAND memory technology.
In this paper, we investigated the electrical impact of memory hole (MH) mis-formation defects in a multi-tier three dimensional (3D) NAND memory technology.