A step towards automation in failure analysis by FIB-SEM 3D tomography and AI segmentation

Tuesday, November 18, 2025: 1:50 PM
1 (Pasadena Convention Center)
Mr. Pascal Limbecker , GlobalFoundries Dresden Module One LLC & Co. KG, Dresden, Saxony, Germany
Dr. Heiko Stegmann , Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Dr. Rong Wu , GlobalFoundries Dresden Module One LLC & Co. KG, Dresden, Saxony, Germany
Dr. Daniel Plencner , Carl Zeiss Microscopy GmbH, Oberkochen, Germany

Summary:

The development of artificial intelligence, deep learning and enhanced FIB-SEM performance in recent years has been remarkable. The subsequent stage in the automation of failure analysis is the segmentation of 3D datasets generated by automated SEM-FIB Slice & View sequences using artificial intelligence. This paper provides a detailed exposition of the current possibilities in this field by means of a case study.