Device Analysis - Case Studies II

Tuesday, October 6, 2026: 3:20 PM-3:40 PM
3:20 PM
Resolving Open Metal Line Defects Driving Logic Emission in a 90-nm Copper based Process Technology using SEM-based Localization and Circuit Analysis
Cheska Amante, Analog Devices Inc.; Camille Joyce Garcia-Awitan, Analog Devices Inc.
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