Mr. Chong Khiam Oh

Manager
GLOBALFOUNDRIES Inc.
Malta, NY
USA 12020

Papers:

Fault Isolation of MOL and FEOL Buried Defects Using Conductive Atomic Force Microscopy as a Complement to Passive Voltage Contrast Imaging
Application of Laser Deprocessing Techniques (LDT) to Improve the Job Efficiency & Throughput on Logic Device
Application of Conductive-AFM in Soft Failure Analysis
Process Flow employed for Parametric Test Structure Shorts Fault Isolation in sub-22 nm technologies in high throughput Foundries