Dr. Lucile C.Teague Sheridan, Ph.D.

Principal Engineer
GLOBALFOUNDRIES Inc.
Malta, NY
USA 12020

Papers:

Fault Isolation of MOL and FEOL Buried Defects Using Conductive Atomic Force Microscopy as a Complement to Passive Voltage Contrast Imaging
Application of Laser Deprocessing Techniques (LDT) to Improve the Job Efficiency & Throughput on Logic Device
Characterization of Gate Oxide Pinhole Defect in NMOS FinFET Devices
Nanoprobing based EBAC technique from backside as well as frontside to isolate logic fails for otherwise non visual defects