Scanning Probe Analysis I

Thursday, November 3, 2022: 11:25 AM-12:30 PM
Ballroom A (Pasadena Convention Center)
Mr. Paiboon Tangyunyang, Sandia Labs and Mr. Phil Kaszuba, Globalfoundries
11:25 AM
Die-level micrometers-deep subsurface imaging for fault isolation using remote bias induced electrostatic force microscopy
Dr. Evgheni Strelcov, NIST/GU; Dr. Lin You, Micron Technology INC; Dr. Yaw Obeng, National Institute of Standards and Technology (NIST); Mr. Joseph Kopanski, National Institute of Standards and Technology (NIST)
11:50 AM
Newly designed, faster, and more sensitive scanning capacitance microscope for failure analysis
Dr. Haigang Zhang, Oxford Instruments Asylum research; Dr. Marta Kocun, Oxford Instruments Asylum research; Dr. Ben Ohler, Oxford Instruments Asylum research; Dr. Roger Proksch, Oxford Instruments Asylum research
12:15 PM
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