FIB Sample Preparation I

Monday, November 17, 2025: 10:20 AM-11:20 AM
1 (Pasadena Convention Center)
Dr. Cathy Vartuli, Vishay Siliconix Inc and Ms. Valerie Brogden
10:20 AM
Leveraging Automation of TEM Sample Preparation for Increased Throughput and Reproducible Results from Advanced Multimodal STEM Analysis of 3-nm FinFET Transistors
Mr. Lukáš Hladík, TESCAN Group; Dr. Daniel Nemecek, TESCAN Group; Mr. Maksym Klymov, TESCAN Group; Mr. Nithin Balaji Venkataraman Iyappan Shankar, TESCAN Group; Mr. Karel Novotny, TESCAN Group
10:40 AM
Understanding of protective deposition layer density for TEM sample preparation on Photoresist at cryogenic temperatures
Ms. Ji Hye Hyun, Thermo Fisher Scientific; Mr. In Chang Choi, Thermo Fisher Scientific; Dr. Chris Kang, Thermo Fisher Scientific
11:00 AM
FIB and STEM Analysis of Protective Coatings
Mr. Sharang Sharang, TESCAN USA; Dr. Anna Mian, TESCAN USA; Dr. Lucille A Giannuzzi, TESCAN USA
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