Nanoprobing & Electrical Characterization I

Tuesday, November 18, 2025: 1:30 PM-2:30 PM

3 (Pasadena Convention Center)

David Albert, IBM (Supplemental) and Mr. John Sanders, Thermofisher

1:30 PM

Improved Defect Localization in Metal-Insulator-Metal Capacitors Using Nanoprobe EBIRCH Technique
Mr. Melvin M. Rodriguez, Analog Devices, Inc.; Mr. Paul Hubert P. Llamera, Analog Devices, Inc.

1:50 PM

Scan-mode assisted LockIn RCI and EBIRCH for localization of low resistive defects
Dr. René Hammer, point electronic GmbH; Dr. Grigore Moldovan, point electronic GmbH; Mr. Willy Lim, Imina Technologies SA; Mr. Wolfgang Joachimi, point electronic GmbH

2:10 PM

Investigating Subsurface Defects: 3D EBAC Mapping with Varying Beam Energies
Mr. Shih-Lin Scott Lee, Eurofins EAG Laboratory; Dr. Lorenz Lechner, Kleindiek Inc.

See more of: Technical Program