FIB Sample Preparation III

Monday, November 17, 2025: 1:40 PM-2:40 PM
1 (Pasadena Convention Center)
1:40 PM
Material Analysis of Cu End-Point Detection for Advanced Node pFIB Delayering Process Optimization
Mr. Or Haimson, Annapurna Labs Ltd, Amazon; Dr. Thibaut Dessolier, Thermo Fisher Scientific; Dr. David Donnet, Thermo Fisher Scientific; Dr. Zdenek Kral, Thermo Fisher Scientific; Dr. Tzach Jaffe, Annapurna Labs Ltd, Amazon; Mrs. Hagit Sagi, Annapurna Labs Ltd, Amazon
2:00 PM
Implementation and Analysis of Open-Source Toolkit for rapid prototyping of automated FIB-SEM workflows and 3D Tomography
Mr. Ishmam Iqbal, Texas Instruments; Dr. Yuyan Wang, Texas Instruments; Mr. Joseph Ziebarth, Texas Instruments; Mr. Ryan Meredith, Texas Instruments; Mr. Tyler Malone, Texas Instruments
2:20 PM
Challenges in High-Precision Auto-TEM Process Development
Dr. Hyun Woo Shim, Intel Corporation; Dr. Taehun Lee, Intel Corporation; Dr. Vikas Dixit, Intel Corporation; Dr. Jonghan Kwon, Intel Corporation; Dr. Keng-Yuan Meng, Intel Corporation
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