Nanoprobing & Electrical Characterization II
Tuesday, November 18, 2025: 3:20 PM-4:20 PM
3 (Pasadena Convention Center)
3:40 PM
Nanoprobing EBIC Analysis to Locate Silicon Defects in CMOS Devices on SOI Wafers
Mr. P. K. Tan, Globalfoundries Singapore Pte Ltd.;
Mr. P.T. Ng, Globalfoundries Singapore Pte Ltd.;
Dr. ACT quah, GLOBALFOUNDRIES Singapore;
Mr. Yong Seng Tam, Globalfoundries Singapore Ltd.;
Ms. Angela Teo, Globalfoundries Singapore Ltd.;
Ms. T. T. Yu, Globalfoundries Singapore Pte Ltd.;
Mr. D NAGALINGAM, GLOBALFOUNDRIES Singapore;
Ms. M.E. lee, Globalfoundries Singapore Pte Ltd.;
Ms. Jessica S.J. Oh, Globalfoundries Singapore Ltd.;
Dr. N.Y. Xu, Globalfoundries Singapore Ltd.;
Mr. K.K. Kang, Globalfoundries Singapore Ltd.;
Dr. S. L. Ting, Globalfoundries Singapore Pte Ltd.;
Dr. C. Q. Chen, Globalfoundries Singapore Pte Ltd.
