Ming Li
Ming Li
Semiconductor Manufacturing International (Shanghai) Corp.
18 Zhangjiang Road China 201203
Shanghai
China
201203
Papers:
TEM Sample Preparation Methods for MEMS Floating Structure Analysis
Development of Productive Polishing TEM Sample Preparation Methodology
A Novel Method for the Specified Site Planar View TEM Sample Preparation
Optimization of TEM Sample Preparation to Reduce the Overlapping of TEM Images