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FIB Sample Preparation

Monday, November 2, 2015: 1:00 PM-2:15 PM
Meeting Room D137 & 138 (Oregon Convention Center )
Session Chairs:  Dr. Tom Schamp, NSD, Hitachi High Technology America Inc., Dallas, TX and Mr. Carl Nail, Failure Analysis Services, MTE Division, Evans Analytical Group, LLC, Irvine, CA
1:00 PM
Vacuum Assisted ex situ lift out for Manipulation of FIB Prepared Specimens
Dr. Lucille A. Giannuzzi, EXpressLO LLC; Dr. Trevor Clark, The Pennsylvania State University; Mr. Dustin Hess, The Pennsylvania State University
1:25 PM
How Xe and Ga FIB differ in inducing lateral damage on TEM samples
Dr. Tomas Hrncir, TESCAN; Dr. Jozef Vincenc Obona, TESCAN; Dr. Christian Lang, Oxford Instruments; Dr. Martin Petrenec, TESCAN; Dr. Jan Michalička, TESCAN ORSAY HOLDING
1:50 PM
Turning sample into (re)solution: Focused Ion Beam shaped Solid Immersion Lenses
Dr. Philipp Scholz, Berlin University of Technology; Michael Sadowski, Berlin University of Technology; Sebastian Kupijai, Berlin University of Technology; Marvin Henniges, Berlin University of Technology; Christoph Theiss, Sicoya GmbH, c/o TU Berlin; Stefan Meister, Sicoya GmbH, c/o TU Berlin; David Stolarek, IHP; Harald H. Richter, IHP; Mahyar Boostandoost, Dialog Semiconductor; Prof. Christian Boit, Berlin University of Technology
See more of: Technical Program