3
Scanning Probe Analysis

Monday, November 2, 2015: 1:00 PM-1:50 PM
Meeting Room D139 & 140 (Oregon Convention Center )
Session Chairs:  Mr. Phil Kaszuba, 967H, Globalfoundries, Essex Junction, VT and Mr. Terence Kane, IBM, Hopewell Junction, NY
1:00 PM
3.1
Near field EMC scanning method based on an E-field collapse method
Mr. Jeffrey C. Dunnihoo, Pragma Design, Inc.; Mr. Pasi Tamminen, Microsoft; Mr. Toni Viheriäkoski, Cascade Metrology
1:25 PM
3.2
Extending Electrical Scanning Probe Microscopy Measurements of Semiconductor Devices using Microwave Impedance Microscopy
Mr. Benedict Drevniok, Chipworks Inc.; Sinjin Dixon-Warren, Chipworks Inc.; Oskar Amster, Prime Nano; Stuart L Friedman, Prime Nano; Yongliang Yang, Prime Nano
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