3D Devices Failure Analysis
Monday, November 6, 2017: 3:00 PM-4:40 PM
Ballroom A (Pasadena Convention Center)
Dr. Christian Schmidt, Carl Zeiss X-Ray Microscopy, Inc. and Ms. Claudia Keller, Infineon Technologies Munich
3:00 PM
STUDENT PAPER: Making synchrotron tomography a routine tool for 3D integration failure analysis through a limited number of projections, an adapted sample preparation scheme, and a fully-automated post-processing
Ms. Alexandra fraczkiewicz, CEA, LETI, MINATEC Campus;
Mr. Pierre-Olivier Autran, ESRF;
Dr. Ennio Capria, ESRF;
Dr. Peter Cloetens, ESRF;
Dr. Julio Da silva, ESRF;
Dr. Sandrine Lhostis, STMicroelectronics;
Dr. Frederic Lorut, STMicroelectronics;
Dr. Stéphane Moreau, Univ. Grenoble Alpes;
Thierry Mourier, Univ. Grenoble Alpes;
Dr. Pierre Bleuet, Univ. Grenoble Alpes
