FIB Sample Preparation

Thursday, November 9, 2017: 8:00 AM-9:40 AM
Ballroom C (Pasadena Convention Center)
Dr. Haifeng Wang, PhD, Western Digital Corporation and Dr. Bryan Tracy, PhD, EAG Laboratories
8:00 AM
Ion Milling of Ex Situ Lift-Out FIB Specimens
Dr. Michael J. Campin, E.A. Fischione Instruments, Inc.; Dr. Cecile S. Bonifacio, E.A. Fischione Instruments, Inc.; Dr. Chris Hyoung H. Kang, GLOBALBOUNDRIES; Mr. Michael F. Boccabella, E.A. Fischione Instruments, Inc.; Mr. Paul Fischione, E.A. Fischione Instruments, Inc.
8:25 AM
Increasing FA Throughput in Challenging Samples Utilizing TRUE X-sectioning and the Rocking Stage
Marek Sikula, TESCAN Brno s.r.o.; Dr. Tomas Hrncir, TESCAN Brno s.r.o.; Mr. Pascal Gounet, STMicroelectronics
8:50 AM
In situ Carbon Deposition in FIB for Reducing TEM Lamella Curtains Caused by Air-gaps of 1X-nm NAND Flash Memory
Dr. Hsin-Cheng Hsu, Macronix International Co., Ltd.; Dr. Chun-Hung Lin, Macronix International Co., Ltd.; Mr. Huai-San Ku, Macronix International Co., Ltd.; Mr. Dun-Fan Zhuang, Macronix International Co., Ltd.; Mrs. Ru-Hui Lin, Macronix International Co., Ltd.; Mr. I-An Chen, Macronix International Co., Ltd.; Mr. Bing-Chang Li, Macronix International Co., Ltd.; Mr. Tsung-Yi Lin, Macronix International Co., Ltd.; Mrs. Pei-Lin Hsu, Macronix International Co., Ltd.; Mr. Wei-Ming Hsiao, Macronix International Co., Ltd.; Mr. Chin-Chih Yeh, Macronix International Co., Ltd.; Mr. N.-T. Lian, Macronix International Co., Ltd.; Mr. Ta-Hone Yang, Macronix International Co., Ltd.; Mr. K.-C. Chen, Macronix International Co., Ltd.
9:15 AM
Practicality of Single Microscope Failure Analysis for Fault Isolation, Analysis and Advanced TEM Sample Preparation by the Integration EBAC and EDS on FIBSEM
Dr. John Lindsay, Oxford Instruments NanoAnalysis; Dr. James T. Sagar, Oxford Instruments NanoAnalysis; Dr. James Holland, Oxford Instruments NanoAnalysis; Dr. Jenny Goulden, Oxford Instruments NanoAnalysis
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