Thursday, November 9, 2017: 8:00 AM-9:40 AM
Ballroom C (Pasadena Convention Center)
Dr. Haifeng Wang, PhD, Western Digital Corporation and Dr. Bryan Tracy, PhD, EAG Laboratories
8:00 AM
Ion Milling of Ex Situ Lift-Out FIB Specimens
Dr. Michael J. Campin, E.A. Fischione Instruments, Inc.;
Dr. Cecile S. Bonifacio, E.A. Fischione Instruments, Inc.;
Dr. Chris Hyoung H. Kang, GLOBALBOUNDRIES;
Mr. Michael F. Boccabella, E.A. Fischione Instruments, Inc.;
Mr. Paul Fischione, E.A. Fischione Instruments, Inc.
8:50 AM
In situ Carbon Deposition in FIB for Reducing TEM Lamella Curtains Caused by Air-gaps of 1X-nm NAND Flash Memory
Dr. Hsin-Cheng Hsu, Macronix International Co., Ltd.;
Dr. Chun-Hung Lin, Macronix International Co., Ltd.;
Mr. Huai-San Ku, Macronix International Co., Ltd.;
Mr. Dun-Fan Zhuang, Macronix International Co., Ltd.;
Mrs. Ru-Hui Lin, Macronix International Co., Ltd.;
Mr. I-An Chen, Macronix International Co., Ltd.;
Mr. Bing-Chang Li, Macronix International Co., Ltd.;
Mr. Tsung-Yi Lin, Macronix International Co., Ltd.;
Mrs. Pei-Lin Hsu, Macronix International Co., Ltd.;
Mr. Wei-Ming Hsiao, Macronix International Co., Ltd.;
Mr. Chin-Chih Yeh, Macronix International Co., Ltd.;
Mr. N.-T. Lian, Macronix International Co., Ltd.;
Mr. Ta-Hone Yang, Macronix International Co., Ltd.;
Mr. K.-C. Chen, Macronix International Co., Ltd.