Nanoprobing and Electrical Characterization II
Tuesday, November 12, 2019: 1:00 PM-2:40 PM
D 137/138 (Oregon Convention Center)
Sweta Pendalaya, DCG Systems and Mr. John Sanders, Thermofisher
2:15 PM
Failure Analysis on Inter Polysilicon Oxide Reliability Issues of 40nm Automotive NVM Device
Mr. P. K. Tan, Globalfoundries Singapore Pte Ltd.;
Mr. Fransiscus Rivai, Globalfoundries Singapore Pte Ltd.;
Dr. Y. L. Pan, Globalfoundries Singapore Pte Ltd.;
Ms. H. H. W. Thoungh, Globalfoundries Singapore Pte Ltd.;
Dr. Siong Luong Ting, Globalfoundries Singapore Pte Ltd.;
Mr. Y.Z. Zhao, Globalfoundries Singapore Pte Ltd.;
Mr. T.L. Wee, GLOBALFOUNDRIES Singapore Pte. Ltd.;
Dr. H tan, Globalfoundries Singapore Pte Ltd.;
Dr. Changqing Chen, Globalfoundries Singapore Pte Ltd.;
Ms. Soh Ping Neo, Globalfoundries Singapore Pte Ltd.;
Mr. Man Hon Thor, Globalfoundries Singapore Pte Ltd.