FIB Sample Preparation & Circuit Edit

Thursday, October 8, 2026: 10:20 AM-12:00 PM
Dr. Cathy Vartuli, Vishay Siliconix Inc and Mr. Antonio Tollis, Analog Devices
10:20 AM
Enhancing Cross-Sectional Milling Performance in Plasma Focused Ion Beam Using Shadow Masking
Dr. Jesun Baek, Thermo Fisher Scientific; Mr. Woo Jun Kwon, Thermo Fisher Scientific; Dr. Chris Kang, Thermo Fisher Scientific
10:40 AM
Enabling High-Resolution AFM Analysis of Advanced Semiconductor Devices through Concentrated Argon Ion Beam Milling
Dr. Cecile S. Bonifacio, EA Fischione Instruments; Dr. Richard Wei-chi Li, EA Fischione Instruments; Dr. Jason Killgore, National Institute of Standards and Technology; Jason Holm, PhD, National Institute of Standards and Technology; Dr. Kuo-Wei Huang, TSMC; Rosalinda Ring, NenoVision s. r. o.; Ms. Mary Ray, EA Fischione Instruments; Mr. Paul Fischione, EA Fischione Instruments
11:00 AM
Ultra-Thin, Structure-Targeted TEM Lamella Preparation Using Multi-Ion PFIB Systems
Mr. Hunter W. Good, Thermo Fisher; Dr. Douglas A. Blom, Thermo Fisher; Dr. Moaz Waqar, Thermo Fisher; Ms. Lillyanne Landers, Thermo Fisher; Dr. Yifei Liu, Thermo Fisher; Mrs. Erin Honse, Thermo Fisher; Dr. Azin Akbari, Thermo Fisher; Dr. Adam Stokes, Thermo Fisher Scientific
11:20 AM
Balancing Speed, Damage, and Fidelity in GaN TEM Preparation: Implications for Correlated PED and DPC Analysis
Ms. Valerie Brogden, Covalent
11:40 AM
Semi-automated FIB sample preparation techniques for TEM characterization of GaN-based power devices
Dr. Jie Yang, TechInsights Inc.; Dr. Jonas Wagner, TechInsights Inc.; Dr. Lina Gunawan, TechInsights Inc.; Dr. Neerushana Jehanathan, TechInsights Inc.
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