Circuit Edit

Wednesday, November 12, 2014: 3:30 PM-4:20 PM
310 B (George R. Brown Convention Center )
Session Chairs:
Mr. Dane Scott and Dr. Michael DiBattista
3:30 PM
Using Energy Dispersive Spectroscopy (EDS) to Determine the Resistance of FIB Jumpers for Circuit Edit
Dr. Michael DiBattista, Qualcomm Technologies, Inc.; Mr. Hasan Faraby, University of California, San Diego; Mr. Corey Senowitz, Qualcomm Technologies, Inc.; Dr. Prabhakar Bandaru, University of California, San Diego
3:55 PM
New Ion Source for High Precision FIB Nanomachining and Circuit Edit
Dr. Adam V. Steele, zeroK NanoTech Corporation; Dr. Brenton Knuffman, zeroK NanoTech Corporation; Dr. Jabez J. McClelland, National Institute of Standards and Technology
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