Nanoprobing and Electrical Characterization II
Monday, November 7, 2016: 2:25 PM-3:40 PM
110AB (Fort Worth Convention Center)
Chairs: Mr. Randall Mulder, Freescale Semiconductor, Inc., Austin, TX
Co-chairs: Ms. Sweta Pendyala, Globalfoundries, Hopewell Junction, NY
2:25 PM
Electron Beam Induced Resistance CHange (EBIRCH) for Device Characterization and Defect Localization
Mr. Gregory M. Johnson, GLOBALFOUNDRIES;
Mr. Christopher D'Aleo, GLOBALFOUNDRIES;
Dr. Ziyan Xu, GLOBALFOUNDRIES;
Mr. Harvey E. Berman, GLOBALFOUNDRIES;
Dr. Yi Feng, GLOBALFOUNDRIES;
Dr. Un-Oh Known, GLOBALFOUNDRIES;
Mr. Brian Yates, GLOBALFOUNDRIES;
Mr. Scott Darling, GLOBALFOUNDRIES;
Dr. Yunyu Wang, GLOBALFOUNDRIES;
Dr. Markus Kagerer, DCG Systems, Inc.;
Mr. R. H. Newton, DCG Systems, Inc.
3:15 PM
Method of Recovering SEM Inspection Induced MOSFETs Degradation Before Electrical Characterization
Dr. Qi Lin, Xilinx, Inc;
Dr. Rung-Jiun Lin, Materials Analysis Technology;
Mr. Hans Pan, Xilinx, Inc;
Dr. Shih-Hsin Chang, Materials Analysis Technology;
Mr. Jonathan Chang, Xilinx, Inc;
Mr. Pau-Sheng Kuo, Materials Analysis Technology;
Dr. Chih-Hsun Chu, Materials Analysis Technology
