FIB Circuit Analysis and Edit

Monday, November 13, 2023: 11:10 AM-11:50 AM
104 A-B (Phoenix Convention Center)
Mr. Antonio Tollis, Analog Devices and Mr. Steven Herschbein, FEI Company
11:10 AM
Defect Isolation in Advanced Nodes Large Circuitry Structures using a Combination of FIB Circuit Edits and Passive Voltage Contrast
Dr. Michael Rodder, Samsung Austin Semiconductor, LLC; Gina Cha, Samsung Austin Semiconductor, LLC; Gilbert Tovar, Samsung Austin Semiconductor, LLC; Mr. Kah Chin Cheong, Samsung Austing Semiconductor LLC.; Mr. Christopher Penley, Samsung Austin Semiconductor, LLC
11:30 AM
Low-kV FIB applications and workflows for advanced circuit edit
Dr. Rongjin Yan, Broadcom; Dr. Alex Buxbaum, Thermo Fisher Scientific; Dr. Majid Vaghayenegar, Thermo Fisher Scientific; Dr. David Donnet, Thermo Fisher Scientific
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