Nanoprobing and Electrical Characterization - Poster

Wednesday, November 9, 2016: 1:30 PM-3:30 PM
Chairs:  Mr. Randall Mulder, Freescale Semiconductor, Inc., Austin, TX
Co-chairs:  Ms. Sweta Pendyala, Globalfoundries, Hopewell Junction, NY
Poly Undercut Induced Device Asymmetric Failure
Mr. Wen Hui Wang, United Microelectronics Corporation; Chun-Cheng Tsao, SMIC
Analysis of SRAM Function Failure Due to Unformed CoSi2 Using Nano-prober and Transmission Electron Microscopy(TEM)
Mr. Jong Eun Kim, SK Hynix semiconductor Inc.
Electrical and nanoprobing analysis on the implantion-related invisible defect
Dr. Changqing Chen, Globalfoundries Singapore; Mr. Ang Ghim Boon, GLOBALFOUNDRIES Singapore Pte Ltd
Study on Effect of Electron Beam Irradiation in SEM-based Nanoprobing on MOS Transistor
Ms. Noriko Hara, Toshiba Nanoanalysis Corporation; Mr. Nanami Bito, Toshiba Nanoanalysis Corporation; Ms. Mai Ebisuda, Toshiba Nanoanalysis Corporation; Mr. Suguru Tabata, Toshiba Nanoanalysis Corporation; Mr. Naoki Numazaki, Toshiba Nanoanalysis Corporation; Mr. Kazunori Masuda, Toshiba; Mr. Naoya Kami, Toshiba
See more of: Technical Program
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